Terahertz microresonators for material characterisation

Terahertz (THz) technology is rapidly evolving, and the advancement of data information processing devices essential. Silicon THz microresonators provide perfect platforms to develop compact integrated that could transform technology. Here we present a systematic study on key figure merit silicon disc - quality factor (Q-factor) in dependence substrate’s resistivity. Our results show Q-factor depends linearly resistivity variation from 10 k?cm 15 changes 50k 76k at 0.6 THz. Moreover, experimentally determine material absorption inversely proportional In general, presented methodology ideally suited precisely measure low-loss materials domain, which challenging using conventional spectroscopy.